Providing the stable precision for 1μm level line width measurement, it is equipped with the high resolution optical microscope manufactured by our company which makes measurement of fine LTPS CD/Overlay possible.
The revolving microscope specification makes it compatible with a broad range of measurements, and color CCD specification makes it compatible with color filters and Organic EL panel observation functions.

With our newly developed edge detection algorithm, previously impossible to detect edges, like those in areas where the layers are arranged in a complex adjacent configuration, or low contrast edges, can be accurately detected. This is an indispensable tool for dealing with the continual miniaturization of the TFT array process with LTPS and the like.

The real time focusing with laser auto-focus, pattern centering reduction function, measurement position learning function, and automatic shortest-route setting function all minimize tact time. For the 6th generation and newer large panel compatible machines, which require even shorter tact times, we have the H2 models, whose 2 heads allow for simultaneous measurement.

Measurement recipes created with the “Measurement recipe creation / edit support software / recipe maker” consists of “measurement position information” and “measurement macro files” where detail measurement contents are described, and both can be combined as you wish, and each easily can be compiled in various ways.
Particularly for the TFT array process in which multiple layers are stacked in the same position, you can drastically increase the efficiency of recipe creation by changing the existing recipes into other layer recipes by changing the contents of the “measurement macro files” without changing the “measurement position information”.