MEMS(Micro Electro Mechanical Systems) are ultra-small electrical and mechanical components. In Japan, they’re also called “micro machines”. This technology can be applied to gyroscopes, accelerometers to sense the posture of the object, and micro-actuators to move things. The precision photo masks used to manufacture these devices are measured with Sinto S-Precision’s products.
Measurement MEMS Photomasks
With MEMS, mechanical components such as miniscule gears and electrical devices such as gyroscopic sensors and accelerometers are made by creating microscopic structures on a glass or silicon board using semiconductor manufacturing technology. Measurements are performed on precision photomasks used to form patterns with photolithography technology.