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- Moving towards the margin of error from the mechanical motion elements of straightness, orthogonality, yawning, pitching, and linearity, the XY stage is designed with a stage position measurement reader located where Abbe’s error is be minimized. Our company has increased rigidity of the actual axis, reduced weight even in large sizes by using the Sinto V-Cerax ceramic air slider in high-end equipment, in addition we achieved XYZ axis driving force to surface expression stage by fixation of the Z axis.
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- Our company has developed a fibre transmission laser interferometer for use as a stage position measurement reader.The laser wavelength correction function is based on environmental error correction of temperature, humidity and atmospheric pressure, and optic tracking revision by a wavelength tracker. Our company’s wavelength revision apparatus measures, tests, and guarantees quality. By the stage control with laser interferometer, 25nm resolution drive control is possible.
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- We design optic microscopes used as the measurement and detection unit of coordinate measurement machines. Using diverse lighting and camera combinations, it is possible to clearly project minute patterns of less than 1μm or hard to recognize changes in brightness like hyaline membrane, and design microscopes with superior sensitivity.
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- The origin of image processing coordinate measurement machines, 256 gradation gray scale processing featuring location detection from brightness information detected by CCD Camera. Through analysis techniques using numerical values of brightness such as detection function of the peak from successive variation points of image processing, or the light-dark orientation function of brightness in a detected edge,accurate detection of image position is possible.