“OPTIFIS IS-R100” is a newly developed white light interferometric microscope which can be used for surface shape measuring and 3D shape analysis in various fields, including surface roughness or shape of engine precision machining parts, electrode geometry of semiconductors, thickness of resist films and shapes of MEMS devices used in acceleration sensors.
- Characteristics of OPTIFIS
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- ・By using white lighting interferometry, surface shapes can be obtained with super precision and with no contact
- ・Subnanometer Z measurement resolutions can be obtained in easy operation
- ・Minute step height and surface roughness can be measured simultaneously
Data Processing
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- 【3D Viewer】
- ・Enables zooming, rotating and positioning of 3D data ・Offers option of illumination display mode or color display mode
- 【3D Viewer】
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- 【2D Viewer】
- ・Displays 2D data ・Displays height of a designated point
- 【2D Viewer】
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- 【Profile Window】
- ・Displays cross-sectional profile of a straight line designated in the 2D Viewer ・Calculates maximum and minimum height etc. within the designated range
- 【Profile Window】
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- 【Roughness Window】
- ・Displays line roughness parameters conforming to JIS B0601:1994/2001 ・Displays surface roughness conforming to ISO 025178
- 【Roughness Window】
Examples of Application
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- Electrode pattern of TFT substrate
(Width: 2μm Height: 0.4μm)
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- Resist pattern of Si substrate
(Groove pitch: 1.7μm Depth: 0.25μm）
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- Scratch on metal grinding surface
(Width: 1.6μm Depth: 0.3μm)
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- Glass micro-blasting processing
(Diameter: 457μm Depth: 2.4μm Roughness: Ra:0.17μm)
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- Barrel gloss polishing on metal
(Roughness Ra：0.036μm)
Standard System
| Measurement method | White light interferometry (vertical scanning method/ phase shift method) |
|---|---|
| Range of height measurement | Select from below before shipment: 100μm / 250μm / 400μm |
| Pixel count of camera | Switchable between: 300,000 pixels (640×480) / 1.2 million pixels (1280×960) |
| Z measurement resolution | 0.1nm |
| Repeatability of step height measurement | 0.25% (objective lens 10×, 4μm for step height measurement) |
| XY Table | Size: 201mm×104mm Amount of movement: X: ±38mm Y: +28mm -23mm |
Options
| Anti-vibration table | Passive anti-vibration table / Active anti-vibration table |
|---|---|
| Objective lens | 5×, 10×, 20×, 50× |
| Surface roughness analysis software | ISO 025178 conformed (under development) |
| Standard block for height calibration | NIST(U.S.A.) with calibration certificate |
| Standard block for roughness | PTB(Germany) with calibration certificate |
